Abstract
Piezoactuators are popularly employed in precise positioning applications at the micro- and nanometer scales. Their positioning performance, especially for low-frequency responses, is significantly impacted by creep - a phenomenon where the actuator deformation gradually changes in the presence of a persistently applied constant voltage. This change in deformation manifests itself in the gradual drifting of the end-effector position that the piezoactuator is driving. A significant research effort has therefore focussed on the accurate modelling of creep. This paper compares three popularly employed creep models against experimentally measured creep data obtained from a piezo-drive nanopositioner axis and quantifies their modelling accuracy. The quantification demonstrates that the fractional-order model (double logarithmic model) outperforms the other two integer-order models (Logarithmic and LTI models) along multiple, key performance indices.
Original language | English |
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Title of host publication | Recent Trends in Wave Mechanics and Vibrations. WMVC 2022. Mechanisms and Machine Science |
Editors | Z. Dimitrovová, P. Biswas, R. Gonçalves, T. Silva |
Publisher | Springer |
Pages | 419-426 |
Number of pages | 8 |
Volume | 125 |
ISBN (Electronic) | 978-3-031-15758-5 |
ISBN (Print) | 978-3-031-15757-8 |
DOIs | |
Publication status | Published - 7 Oct 2022 |
Event | WMVC 2022: 10th International Conference on Wave Mechanics and Vibrations - Lisbon, Portugal Duration: 4 Jul 2022 → 6 Jul 2022 Conference number: 10th https://easychair.org/cfp/wmvc2022 |
Publication series
Name | Mechanisms and Machine Science |
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Publisher | Springer |
ISSN (Print) | 2211-0984 |
ISSN (Electronic) | 2211-0992 |
Conference
Conference | WMVC 2022 |
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Abbreviated title | WMVC 2022 |
Country/Territory | Portugal |
City | Lisbon |
Period | 4/07/22 → 6/07/22 |
Internet address |
Keywords
- Creep dynamics
- Nanopositioning
- Piezoelectric actuator
- Fractional-order modelling