A Modified Positive Velocity and Position Feedback scheme with delay compensation for improved nanopositioning performance

Andres San-Millan, Douglas Russell, Vicente Feliu, Sumeet Sunil Aphale

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Abstract

This paper presents a controller design to compensate the effects of time delay in a flexure-based piezoelectric stack driven nanopositioner. The effects of the time delay in flexure nanopositioners is illustrated and identified by means of experimentally obtaining the frequency response of the system. Moreover, a theoretical model which takes into account the dependence between the sampling time and the delay introduced is proposed. The proposed control design methodology not only accommodates for time delay but also ensures the robust stability and allows its application to systems with a larger delay than other schemes proposed previously. Limitations and future work are discussed.
Original languageEnglish
Article number075021
Number of pages11
JournalSmart Materials & Structures
Volume24
Issue number7
Early online date11 Jun 2015
DOIs
Publication statusPublished - 11 Jun 2015

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Keywords

  • high-speed atomic force microscope
  • flexure guided nanopositioner
  • piezoelectric actuators
  • positive velocity and position feedback
  • active vibration control
  • time delay

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