This paper presents a controller design to compensate the effects of time delay in a flexure-based piezoelectric stack driven nanopositioner. The effects of the time delay in flexure nanopositioners is illustrated and identified by means of experimentally obtaining the frequency response of the system. Moreover, a theoretical model which takes into account the dependence between the sampling time and the delay introduced is proposed. The proposed control design methodology not only accommodates for time delay but also ensures the robust stability and allows its application to systems with a larger delay than other schemes proposed previously. Limitations and future work are discussed.
- high-speed atomic force microscope
- flexure guided nanopositioner
- piezoelectric actuators
- positive velocity and position feedback
- active vibration control
- time delay