A large substrate manipulator allowing temperature variation between 80 and 870 K while providing 2D translation and tilt capabilities is outlined.
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
Pritchard, F., Wood, S., Marr, G. V., & Player, M. A. (1989). A multipurpose UHV manipulator for surface studies. Journal of Physics: Condensed Matter, 1(Suppl. B), [SB227]. https://doi.org/10.1088/0953-8984/1/SB/053