A new robust damping and tracking controller for SPM positioning stages

Andrew J. Fleming, Sumeet S. Aphale, S. O.Reza Moheimani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or op-amp circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain-margin from 2 dB to 7 dB. The penalty on sensor induced positioning noise is minimal. For the Scanning Probe Microscope considered in this paper, the noise is marginally increased from 0.30 nm RMS to 0.39 nm RMS. Open- and closed-loop experimental images of a calibration standard are reported at speeds of 1 and 10 lines per second (with a scanner resonance frequency of 290 Hz). Compared to traditional integral or PID controllers, the proposed controller provides a bandwidth improvement of approximately ten times. This allows faster imaging and less tracking lag at low speeds.

Original languageEnglish
Title of host publication2009 American Control Conference, ACC 2009
PublisherIEEE Explore
Pages289-294
Number of pages6
ISBN (Print)9781424445240
DOIs
Publication statusPublished - 24 Nov 2009
Event2009 American Control Conference, ACC 2009 - St. Louis, MO, United States
Duration: 10 Jun 200912 Jun 2009

Conference

Conference2009 American Control Conference, ACC 2009
CountryUnited States
CitySt. Louis, MO
Period10/06/0912/06/09

Fingerprint

Damping
Controllers
Microscopes
Scanning
Bandwidth
Operational amplifiers
Sensors
Calibration
Imaging techniques
Networks (circuits)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Fleming, A. J., Aphale, S. S., & Moheimani, S. O. R. (2009). A new robust damping and tracking controller for SPM positioning stages. In 2009 American Control Conference, ACC 2009 (pp. 289-294). [5159934] IEEE Explore. https://doi.org/10.1109/ACC.2009.5159934

A new robust damping and tracking controller for SPM positioning stages. / Fleming, Andrew J.; Aphale, Sumeet S.; Moheimani, S. O.Reza.

2009 American Control Conference, ACC 2009. IEEE Explore, 2009. p. 289-294 5159934.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fleming, AJ, Aphale, SS & Moheimani, SOR 2009, A new robust damping and tracking controller for SPM positioning stages. in 2009 American Control Conference, ACC 2009., 5159934, IEEE Explore, pp. 289-294, 2009 American Control Conference, ACC 2009, St. Louis, MO, United States, 10/06/09. https://doi.org/10.1109/ACC.2009.5159934
Fleming AJ, Aphale SS, Moheimani SOR. A new robust damping and tracking controller for SPM positioning stages. In 2009 American Control Conference, ACC 2009. IEEE Explore. 2009. p. 289-294. 5159934 https://doi.org/10.1109/ACC.2009.5159934
Fleming, Andrew J. ; Aphale, Sumeet S. ; Moheimani, S. O.Reza. / A new robust damping and tracking controller for SPM positioning stages. 2009 American Control Conference, ACC 2009. IEEE Explore, 2009. pp. 289-294
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