Abstract
Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a $H_{\infty}$-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.
Original language | English |
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Pages (from-to) | 88-96 |
Number of pages | 9 |
Journal | Sensors and Actuators: A. Physical |
Volume | 204 |
Early online date | 24 Oct 2013 |
DOIs | |
Publication status | Published - 15 Dec 2013 |
Keywords
- Nanopositioning
- H-infinity loop shaping
- resonance damping
- tracking
- rastering