A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Antoine Ferreira; Sumeet Sunil Aphale

doi:10.1109/TSMCC.2010.2072779

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Antoine Ferreira, Sumeet Sunil Aphale

Institut PRISME, ENSI Bourges, France

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

15 Downloads (Pure)

Abstract

In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends.

Original language	English
Pages (from-to)	350 - 364
Number of pages	15
Journal	IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews
Volume	41
Issue number	3
DOIs	https://doi.org/10.1109/TSMCC.2010.2072779
Publication status	Published - May 2011

Keywords

control
lab-on-a-chip
microelectromechanical systems (MEMS)
modeling
nanoelectromechanical systems (NEMS)

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10.1109/TSMCC.2010.2072779

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Cite this

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KW - nanoelectromechanical systems (NEMS)

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A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Abstract

Keywords

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