Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties

Sumeet Sunil Aphale; Santosh Devasia; S. O. R. Moheimani

doi:10.1109/AIM.2008.4601788

Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties

Sumeet Sunil Aphale, Santosh Devasia, S. O. R. Moheimani

Research output: Chapter in Book/Report/Conference proceeding › Published conference contribution

1 Citation (Scopus)

Abstract

In the absence of plant parameter uncertainties, inversion-based feedforward techniques have been known to deliver accurate tracking performance. Due to changes in operating conditions like ambient temperature, humidity and loading, piezoelectric-stack actuated nanopositioning platforms can undergo significant changes in their system parameters. Nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator, are also present; charge actuation is applied to reduce the effects of hysteresis. In this work, a suitable feedback controller that reduces the effects of parameter uncertainties is integrated with the inversion-based feedforward technique to deliver accurate nanopositioning over a large bandwidth. It is shown experimentally that by integrating closed-loop damping, inversion-based feedforward and charge actuation, the tracking bandwidth of the platform from can be increased significantly from 310 Hz to 1320 Hz.

Original language	English
Title of host publication	Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China
Publisher	IEEE Explore
Pages	943-948
Number of pages	6
ISBN (Print)	978-1-4244-2494-8
DOIs	https://doi.org/10.1109/AIM.2008.4601788
Publication status	Published - 19 Aug 2008
Event	2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Xi'an, China Duration: 2 Jul 2008 → 5 Jul 2008 https://ieeexplore.ieee.org/xpl/conhome/4594793/proceeding

Publication series

Name	IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Publisher	IEEE
ISSN (Print)	2159-6247
ISSN (Electronic)	2159-6255

Conference

Conference	2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Abbreviated title	AIM 2008
Country/Territory	China
City	Xi'an
Period	2/07/08 → 5/07/08
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4594793/proceeding

Keywords

Nanopositioning
Feedforward
Feedback
high-speed tracking

Access to Document

10.1109/AIM.2008.4601788Licence: Unspecified

Cite this

Aphale, S. S., Devasia, S., & Moheimani, S. O. R. (2008). Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties. In Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China (pp. 943-948). ( IEEE/ASME International Conference on Advanced Intelligent Mechatronics ). IEEE Explore. https://doi.org/10.1109/AIM.2008.4601788

Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties. / Aphale, Sumeet Sunil; Devasia, Santosh; Moheimani, S. O. R.

Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China. IEEE Explore, 2008. p. 943-948 ( IEEE/ASME International Conference on Advanced Intelligent Mechatronics ).

Research output: Chapter in Book/Report/Conference proceeding › Published conference contribution

Aphale, SS, Devasia, S & Moheimani, SOR 2008, Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties. in Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China. IEEE/ASME International Conference on Advanced Intelligent Mechatronics , IEEE Explore, pp. 943-948, 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China, 2/07/08. https://doi.org/10.1109/AIM.2008.4601788

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title = "Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties",

abstract = "In the absence of plant parameter uncertainties, inversion-based feedforward techniques have been known to deliver accurate tracking performance. Due to changes in operating conditions like ambient temperature, humidity and loading, piezoelectric-stack actuated nanopositioning platforms can undergo significant changes in their system parameters. Nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator, are also present; charge actuation is applied to reduce the effects of hysteresis. In this work, a suitable feedback controller that reduces the effects of parameter uncertainties is integrated with the inversion-based feedforward technique to deliver accurate nanopositioning over a large bandwidth. It is shown experimentally that by integrating closed-loop damping, inversion-based feedforward and charge actuation, the tracking bandwidth of the platform from can be increased significantly from 310 Hz to 1320 Hz.",

keywords = "Nanopositioning, Feedforward, Feedback, high-speed tracking",

author = "Aphale, {Sumeet Sunil} and Santosh Devasia and Moheimani, {S. O. R.}",

note = "This research was supported by the Australian Research Council{\textquoteright}s Center of Excellence for Complex Dynamic Systems and Control at the University of Newcastle, Callaghan, Australia.; 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2008 ; Conference date: 02-07-2008 Through 05-07-2008",

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AU - Devasia, Santosh

AU - Moheimani, S. O. R.

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N2 - In the absence of plant parameter uncertainties, inversion-based feedforward techniques have been known to deliver accurate tracking performance. Due to changes in operating conditions like ambient temperature, humidity and loading, piezoelectric-stack actuated nanopositioning platforms can undergo significant changes in their system parameters. Nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator, are also present; charge actuation is applied to reduce the effects of hysteresis. In this work, a suitable feedback controller that reduces the effects of parameter uncertainties is integrated with the inversion-based feedforward technique to deliver accurate nanopositioning over a large bandwidth. It is shown experimentally that by integrating closed-loop damping, inversion-based feedforward and charge actuation, the tracking bandwidth of the platform from can be increased significantly from 310 Hz to 1320 Hz.

AB - In the absence of plant parameter uncertainties, inversion-based feedforward techniques have been known to deliver accurate tracking performance. Due to changes in operating conditions like ambient temperature, humidity and loading, piezoelectric-stack actuated nanopositioning platforms can undergo significant changes in their system parameters. Nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator, are also present; charge actuation is applied to reduce the effects of hysteresis. In this work, a suitable feedback controller that reduces the effects of parameter uncertainties is integrated with the inversion-based feedforward technique to deliver accurate nanopositioning over a large bandwidth. It is shown experimentally that by integrating closed-loop damping, inversion-based feedforward and charge actuation, the tracking bandwidth of the platform from can be increased significantly from 310 Hz to 1320 Hz.

KW - Nanopositioning

KW - Feedforward

KW - Feedback

KW - high-speed tracking

U2 - 10.1109/AIM.2008.4601788

DO - 10.1109/AIM.2008.4601788

M3 - Published conference contribution

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BT - Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China

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ER -

Achieving High-Bandwidth Nanopositioning In Presence of Plant Uncertainties

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