Chemical vapour deposition (CVD) of molybdenum into medium pore H-zeolites

S. Suwardiyanto, S. Svelle, R. F. Howe*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


Several medium pore H-zeolites (HZSM-5, HIM-5, HTNU-9 and HZSM-11) were evaluated toward molybdenum deposition via chemical vapor deposition using Mo(CO)6 as the molybdenum precursor. The deposition was through a high temperature adsorption of Mo(CO)6 vapor onto dehydrated zeolites. The progress of deposition was monitored gravimetrically. Exsitu infrared (FTIR) spectroscopy was employed to observe the interaction between Mo(CO)6 and the zeolites during the deposition. X-ray photoelectron spectroscopy (XPS) was used to scrutinize the nature of molybdenum deposit within the zeolite. High temperature adsorption of Mo(CO)6 vapor is an irreversible adsorption resulted in a molybdenum deposition onto the zeolites whereas the adsorption conducted at room temperature is a reversible one. Interaction of Mo(CO)6 and the zeolites at high temperature led to the reaction of Mo(CO)6 and hydroxyl group within zeolites i.e. silanol group and Brnsted acid site. The molybdenum dispersion within the zeolites was governed by the particle size of the zeolite. More concentrated molybdenum deposited on zeolite surface occurred on the zeolite with bigger particle size. The highest surface molybdenum deposition was observed on ZSM-11 surface as it has the biggest particle size.

Original languageEnglish
Article number012056
JournalIOP Conference Series: Materials Science and Engineering
Issue number1
Publication statusPublished - 28 Apr 2020
Event3rd International Symposium on Current Progress in Functional Materials 2018, ISCPFM 2018 - Depok, Indonesia
Duration: 8 Aug 20189 Aug 2018


Dive into the research topics of 'Chemical vapour deposition (CVD) of molybdenum into medium pore H-zeolites'. Together they form a unique fingerprint.

Cite this