Energy enhancement and chaos control in microelectromechanical systems

Kwangho Park, Qingfei Chen, Ying-Cheng Lai

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

Original languageEnglish
Article number026210
Number of pages6
JournalPhysical Review. E, Statistical, Nonlinear and Soft Matter Physics
Volume77
Issue number2
DOIs
Publication statusPublished - Feb 2008

Keywords

  • self-controlling feedback
  • parametric resonance
  • dynamical analysis
  • mass sensor
  • microcantilevers
  • microchannel
  • instability
  • oscillator
  • flows
  • MEMS

Cite this

Energy enhancement and chaos control in microelectromechanical systems. / Park, Kwangho; Chen, Qingfei; Lai, Ying-Cheng.

In: Physical Review. E, Statistical, Nonlinear and Soft Matter Physics, Vol. 77, No. 2, 026210, 02.2008.

Research output: Contribution to journalArticle

@article{399e0d1b24114b07aa1fcb677ca677df,
title = "Energy enhancement and chaos control in microelectromechanical systems",
abstract = "For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.",
keywords = "self-controlling feedback, parametric resonance, dynamical analysis, mass sensor, microcantilevers, microchannel, instability, oscillator, flows, MEMS",
author = "Kwangho Park and Qingfei Chen and Ying-Cheng Lai",
year = "2008",
month = "2",
doi = "10.1103/PhysRevE.77.026210",
language = "English",
volume = "77",
journal = "Physical Review. E, Statistical, Nonlinear and Soft Matter Physics",
issn = "1539-3755",
publisher = "AMER PHYSICAL SOC",
number = "2",

}

TY - JOUR

T1 - Energy enhancement and chaos control in microelectromechanical systems

AU - Park, Kwangho

AU - Chen, Qingfei

AU - Lai, Ying-Cheng

PY - 2008/2

Y1 - 2008/2

N2 - For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

AB - For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

KW - self-controlling feedback

KW - parametric resonance

KW - dynamical analysis

KW - mass sensor

KW - microcantilevers

KW - microchannel

KW - instability

KW - oscillator

KW - flows

KW - MEMS

U2 - 10.1103/PhysRevE.77.026210

DO - 10.1103/PhysRevE.77.026210

M3 - Article

VL - 77

JO - Physical Review. E, Statistical, Nonlinear and Soft Matter Physics

JF - Physical Review. E, Statistical, Nonlinear and Soft Matter Physics

SN - 1539-3755

IS - 2

M1 - 026210

ER -