Energy enhancement and chaos control in microelectromechanical systems

Kwangho Park, Qingfei Chen, Ying-Cheng Lai

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

Original languageEnglish
Article number026210
Number of pages6
JournalPhysical Review. E, Statistical, Nonlinear and Soft Matter Physics
Volume77
Issue number2
DOIs
Publication statusPublished - Feb 2008

Keywords

  • self-controlling feedback
  • parametric resonance
  • dynamical analysis
  • mass sensor
  • microcantilevers
  • microchannel
  • instability
  • oscillator
  • flows
  • MEMS

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