Fractional repetitive control of nanopositioning stages for high-speed scanning using low-pass FIR variable fractional delay filter

Linlin Li, Zaozao Chen, Sumeet Aphale, LiMin Zhu*

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

The Repetitive Control (RC), capable of tracking periodic trajectories and rejecting periodic disturbances, is a
promising technique to control the nanopositioning stages for
high-speed raster scanning. In digital implementation of the
RC scheme, the number of delay points has to be an integer,
which implies that the sampling frequency should be an integer multiple of the desired tracking frequency. Clearly, this is a severe limitation on the range of the trajectory frequencies where the RC scheme can effectively be applied. To overcome this limitation,this paper proposes a low-pass FIR variable fractional delay filter as an alternative to the conventional interpolating method employed in conventional fractional RC scheme. This filter combines the interpolating and the low-pass filtering that are employed in the fractional RC and its coefficients are analytically computed as a function of fractional delay, thereby making it suitable for trajectories of all frequencies. The weightedleast- square method is employed to design the low-pass FIR variable fractional delay filter, where the weights are tuned to minimize the approximation errors within the bandwidth-of interested.
Experimental results are presented to demonstrate the
advantages of the proposed method over the conventional RC
scheme as well as the interpolating based fractional RC scheme. These results show that the proposed RC scheme with lowpass FIR variable fractional delay filter improves the tracking performance of the nanopositioner significantly, especially for the trajectories with high-frequency.
Original languageEnglish
JournalIEEE/ASME Transactions on Mechatronics
Publication statusAccepted/In press - 15 Jan 2020

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@article{01d9def0812645a0bf64354463ef0a43,
title = "Fractional repetitive control of nanopositioning stages for high-speed scanning using low-pass FIR variable fractional delay filter",
abstract = "The Repetitive Control (RC), capable of tracking periodic trajectories and rejecting periodic disturbances, is apromising technique to control the nanopositioning stages forhigh-speed raster scanning. In digital implementation of theRC scheme, the number of delay points has to be an integer,which implies that the sampling frequency should be an integer multiple of the desired tracking frequency. Clearly, this is a severe limitation on the range of the trajectory frequencies where the RC scheme can effectively be applied. To overcome this limitation,this paper proposes a low-pass FIR variable fractional delay filter as an alternative to the conventional interpolating method employed in conventional fractional RC scheme. This filter combines the interpolating and the low-pass filtering that are employed in the fractional RC and its coefficients are analytically computed as a function of fractional delay, thereby making it suitable for trajectories of all frequencies. The weightedleast- square method is employed to design the low-pass FIR variable fractional delay filter, where the weights are tuned to minimize the approximation errors within the bandwidth-of interested.Experimental results are presented to demonstrate theadvantages of the proposed method over the conventional RCscheme as well as the interpolating based fractional RC scheme. These results show that the proposed RC scheme with lowpass FIR variable fractional delay filter improves the tracking performance of the nanopositioner significantly, especially for the trajectories with high-frequency.",
author = "Linlin Li and Zaozao Chen and Sumeet Aphale and LiMin Zhu",
note = "This work was supported by the National Natural Science Foundation of China under Grant 51975375, the Binks Trust Visiting Research Fellowship (2018) (University of Aberdeen, UK) awarded to Dr. Sumeet S. Aphale and the SJTU overseas study grant awarded to Linlin Li. The authors would like to thank Mr. Wulin Yan for his assistance with the experiments.",
year = "2020",
month = "1",
day = "15",
language = "English",
journal = "IEEE/ASME Transactions on Mechatronics",
issn = "1083-4435",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Fractional repetitive control of nanopositioning stages for high-speed scanning using low-pass FIR variable fractional delay filter

AU - Li, Linlin

AU - Chen, Zaozao

AU - Aphale, Sumeet

AU - Zhu, LiMin

N1 - This work was supported by the National Natural Science Foundation of China under Grant 51975375, the Binks Trust Visiting Research Fellowship (2018) (University of Aberdeen, UK) awarded to Dr. Sumeet S. Aphale and the SJTU overseas study grant awarded to Linlin Li. The authors would like to thank Mr. Wulin Yan for his assistance with the experiments.

PY - 2020/1/15

Y1 - 2020/1/15

N2 - The Repetitive Control (RC), capable of tracking periodic trajectories and rejecting periodic disturbances, is apromising technique to control the nanopositioning stages forhigh-speed raster scanning. In digital implementation of theRC scheme, the number of delay points has to be an integer,which implies that the sampling frequency should be an integer multiple of the desired tracking frequency. Clearly, this is a severe limitation on the range of the trajectory frequencies where the RC scheme can effectively be applied. To overcome this limitation,this paper proposes a low-pass FIR variable fractional delay filter as an alternative to the conventional interpolating method employed in conventional fractional RC scheme. This filter combines the interpolating and the low-pass filtering that are employed in the fractional RC and its coefficients are analytically computed as a function of fractional delay, thereby making it suitable for trajectories of all frequencies. The weightedleast- square method is employed to design the low-pass FIR variable fractional delay filter, where the weights are tuned to minimize the approximation errors within the bandwidth-of interested.Experimental results are presented to demonstrate theadvantages of the proposed method over the conventional RCscheme as well as the interpolating based fractional RC scheme. These results show that the proposed RC scheme with lowpass FIR variable fractional delay filter improves the tracking performance of the nanopositioner significantly, especially for the trajectories with high-frequency.

AB - The Repetitive Control (RC), capable of tracking periodic trajectories and rejecting periodic disturbances, is apromising technique to control the nanopositioning stages forhigh-speed raster scanning. In digital implementation of theRC scheme, the number of delay points has to be an integer,which implies that the sampling frequency should be an integer multiple of the desired tracking frequency. Clearly, this is a severe limitation on the range of the trajectory frequencies where the RC scheme can effectively be applied. To overcome this limitation,this paper proposes a low-pass FIR variable fractional delay filter as an alternative to the conventional interpolating method employed in conventional fractional RC scheme. This filter combines the interpolating and the low-pass filtering that are employed in the fractional RC and its coefficients are analytically computed as a function of fractional delay, thereby making it suitable for trajectories of all frequencies. The weightedleast- square method is employed to design the low-pass FIR variable fractional delay filter, where the weights are tuned to minimize the approximation errors within the bandwidth-of interested.Experimental results are presented to demonstrate theadvantages of the proposed method over the conventional RCscheme as well as the interpolating based fractional RC scheme. These results show that the proposed RC scheme with lowpass FIR variable fractional delay filter improves the tracking performance of the nanopositioner significantly, especially for the trajectories with high-frequency.

M3 - Article

JO - IEEE/ASME Transactions on Mechatronics

JF - IEEE/ASME Transactions on Mechatronics

SN - 1083-4435

ER -