Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

Linlin Li, Zaozao Chen, Sumeet S. Aphale, LiMin Zhu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)
5 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter'. Together they form a unique fingerprint.

Engineering & Materials Science