Optimization of reflectivity of periodic and quasiperiodic multilayer films at soft x-ray wavelengths

E. Gu*, G. V. Marr, M. A. Player

*Corresponding author for this work

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

In this paper, the optimization of reflectivity of multilayer films has been studied further and a new design method which can be used to increase bandwidth and change the shape of reflectivity curves of multilayer films in the soft X-ray region is presented.

Original languageEnglish
Pages (from-to)99-106
Number of pages8
JournalOptics Communications
Volume77
Issue number1
DOIs
Publication statusPublished - 1 Jun 1990

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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