Phase step measurement and variable step algorithms in phase-shifting interferometry

C. T. Farrell*, M. A. Player

*Corresponding author for this work

Research output: Contribution to journalArticle

114 Citations (Scopus)

Abstract

A novel method, utilizing Lissajous figures and ellipse fitting, of calculating the phase difference between interferograms obtained from a phase shifting interferometer is described. Intensity bias and intensity modulation of interferograms are also calculated using this technique. Two new phase extraction algorithms are presented which use intensity and phase step information to calculate a surface from interferograms acquired with uneven phase steps. One algorithm allows surface phase to be calculated from two interferograms. Preliminary results from the Lissajous figure technique and the presented algorithms are discussed.

Original languageEnglish
Pages (from-to)953-958
Number of pages6
JournalMeasurement Science and Technology
Volume3
Issue number10
DOIs
Publication statusPublished - Oct 1992

ASJC Scopus subject areas

  • Instrumentation
  • Applied Mathematics

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