Photoisomerisation of Irgacure PAG 103 followed by photocyclisation and fragmentation leads to three tricyclic thieno[2,3-b]quinoline-4-carbonitrile heterocyclic compounds. The release of acid which can catalyse polymer resist modifications is indicated by the low pH of an aqueous extract. These reactions are discussed in view of possible mechanisms and how these might influence future design strategies.
- Irgacure PAG 103
- chemical amplification
- photoacid generator
- oxime sulfonate
- CHEMICAL AMPLIFICATION RESISTS
- CONTAINED PHOTOACID GENERATOR