Resonance-shifting Integral Resonant Control for High-speed Nanopositioning

Sumeet Sunil Aphale, Mohammad Namavar, Andrew J. Fleming

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Abstract

The first resonance mode of mechanical systems is a significant limit to the achievable positioning bandwidth. This resonance is dependent on the physical, material and geometric properties of the system. Significant effort is typically required to increase the resonance frequency by increasing stiffness or reducing mass. In this article, a modified IRC scheme is presented that effectively shifts the first resonance mode to a higher frequency, thereby enabling a substantially higher positioning bandwidth. A 70% increase in positioning bandwidth is demonstrated.

Conference

ConferenceAmerican Control Conference (ACC), 2018
CountryUnited States
CityMilwaukee
Period27/06/1829/06/18
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Aphale, S. S., Namavar, M., & Fleming, A. J. (2018). Resonance-shifting Integral Resonant Control for High-speed Nanopositioning. In Proceedings of the American Control Conference (ACC) 2018 Institute of Electrical and Electronics Engineers (IEEE).