Variation of preferred orientation of erbium thin films with temperature and substrate

G. R G Craib*, M. A. Player, M. J. Rodman, C. C. Tang

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Pole figures have been collected for erbium thin films (600nm, 1200nm and 200nm thick) grown on molybdenum or glass substrates. These pole figures were collected by an energy dispersive XRD powder camera which was automated so as to provide rotation of the sample around axes parallel to the input beam, and normal to the sample. Additional information can be provided concurrently, namely an evaluation of stresses within the film, approximate crystallite sizing, and film thickness determination. Results show a substantial effect contributed by the substrate on the orientation of the films at ambient deposition temperatures, and the development of strong (002) orientation of films deposited at around 650K substrate temperature, as previously found. Also observed is a mixed fibre texture at both lower temperature (300K) and higher temperature (800K).

Original languageEnglish
Pages (from-to)469-474
Number of pages6
JournalMaterials Science Forum
Volume228-231
Issue numberPart 2
DOIs
Publication statusPublished - 1 Dec 1996

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Keywords

  • Erbium
  • Texture
  • Thin Film Materials

ASJC Scopus subject areas

  • Materials Science(all)

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