Pole figures have been collected for erbium thin films (600nm, 1200nm and 200nm thick) grown on molybdenum or glass substrates. These pole figures were collected by an energy dispersive XRD powder camera which was automated so as to provide rotation of the sample around axes parallel to the input beam, and normal to the sample. Additional information can be provided concurrently, namely an evaluation of stresses within the film, approximate crystallite sizing, and film thickness determination. Results show a substantial effect contributed by the substrate on the orientation of the films at ambient deposition temperatures, and the development of strong (002) orientation of films deposited at around 650K substrate temperature, as previously found. Also observed is a mixed fibre texture at both lower temperature (300K) and higher temperature (800K).
|Number of pages||6|
|Journal||Materials Science Forum|
|Issue number||Part 2|
|Publication status||Published - 1 Dec 1996|
- Thin Film Materials
ASJC Scopus subject areas
- Materials Science(all)