High-bandwidth Control of a Piezoelectric Nanopositioning Stage in the Presence of Plant Uncertainties

Sumeet Sunil Aphale, Santosh Devasia, S. O. R. Moheimani

Research output: Contribution to journalArticle

99 Citations (Scopus)

Abstract

Inversion-based feedforward techniques have been known to deliver accurate tracking performance in the absence of plant parameter uncertainties. Piezoelectric stack actuated nanopositioning platforms are prone to variations in their system parameters such as resonance frequencies, due to changes in operating conditions like ambient temperature, humidity and loading. They also suffer from nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator; charge actuation is applied to reduce the effects of hysteresis. In this work, we propose and test a technique that integrates a suitable feedback controller to reduce the effects of parameter uncertainties with the inversion-based feedforward technique. It is shown experimentally that the combination of damping, feedforward and charge actuation increases the tracking bandwidth of the platform from 310 to 1320 Hz.
Original languageEnglish
Article number125503
Number of pages9
JournalNanotechnology
Volume19
Issue number12
DOIs
Publication statusPublished - 26 Mar 2008

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Hysteresis
Bandwidth
Piezoelectric actuators
Atmospheric humidity
Damping
Feedback
Controllers
Temperature
Uncertainty

Keywords

  • feedback
  • nanoscale
  • tracking
  • design
  • instrumentation
  • measurement
  • micromechanical devices
  • servo equipment
  • control equipment

Cite this

High-bandwidth Control of a Piezoelectric Nanopositioning Stage in the Presence of Plant Uncertainties. / Aphale, Sumeet Sunil; Devasia, Santosh; Moheimani, S. O. R.

In: Nanotechnology, Vol. 19, No. 12, 125503, 26.03.2008.

Research output: Contribution to journalArticle

@article{f4521320895a4fa98b8ad3eb6c2a1baa,
title = "High-bandwidth Control of a Piezoelectric Nanopositioning Stage in the Presence of Plant Uncertainties",
abstract = "Inversion-based feedforward techniques have been known to deliver accurate tracking performance in the absence of plant parameter uncertainties. Piezoelectric stack actuated nanopositioning platforms are prone to variations in their system parameters such as resonance frequencies, due to changes in operating conditions like ambient temperature, humidity and loading. They also suffer from nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator; charge actuation is applied to reduce the effects of hysteresis. In this work, we propose and test a technique that integrates a suitable feedback controller to reduce the effects of parameter uncertainties with the inversion-based feedforward technique. It is shown experimentally that the combination of damping, feedforward and charge actuation increases the tracking bandwidth of the platform from 310 to 1320 Hz.",
keywords = "feedback, nanoscale, tracking, design, instrumentation , measurement, micromechanical devices, servo equipment, control equipment",
author = "Aphale, {Sumeet Sunil} and Santosh Devasia and Moheimani, {S. O. R.}",
year = "2008",
month = "3",
day = "26",
doi = "10.1088/0957-4484/19/12/125503",
language = "English",
volume = "19",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "12",

}

TY - JOUR

T1 - High-bandwidth Control of a Piezoelectric Nanopositioning Stage in the Presence of Plant Uncertainties

AU - Aphale, Sumeet Sunil

AU - Devasia, Santosh

AU - Moheimani, S. O. R.

PY - 2008/3/26

Y1 - 2008/3/26

N2 - Inversion-based feedforward techniques have been known to deliver accurate tracking performance in the absence of plant parameter uncertainties. Piezoelectric stack actuated nanopositioning platforms are prone to variations in their system parameters such as resonance frequencies, due to changes in operating conditions like ambient temperature, humidity and loading. They also suffer from nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator; charge actuation is applied to reduce the effects of hysteresis. In this work, we propose and test a technique that integrates a suitable feedback controller to reduce the effects of parameter uncertainties with the inversion-based feedforward technique. It is shown experimentally that the combination of damping, feedforward and charge actuation increases the tracking bandwidth of the platform from 310 to 1320 Hz.

AB - Inversion-based feedforward techniques have been known to deliver accurate tracking performance in the absence of plant parameter uncertainties. Piezoelectric stack actuated nanopositioning platforms are prone to variations in their system parameters such as resonance frequencies, due to changes in operating conditions like ambient temperature, humidity and loading. They also suffer from nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator; charge actuation is applied to reduce the effects of hysteresis. In this work, we propose and test a technique that integrates a suitable feedback controller to reduce the effects of parameter uncertainties with the inversion-based feedforward technique. It is shown experimentally that the combination of damping, feedforward and charge actuation increases the tracking bandwidth of the platform from 310 to 1320 Hz.

KW - feedback

KW - nanoscale

KW - tracking

KW - design

KW - instrumentation

KW - measurement

KW - micromechanical devices

KW - servo equipment

KW - control equipment

U2 - 10.1088/0957-4484/19/12/125503

DO - 10.1088/0957-4484/19/12/125503

M3 - Article

VL - 19

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 12

M1 - 125503

ER -